J2220203 超精密切削加工を利用した金属ナノドットアレイの効率的製造法の検討

抄録

Metal nano-dot array, consisting of a glass substrate and metal dots arranged on it, has the property of localized surface plasmon resonance and it's expected to be applied to optical devices or biosensors. For fabrication of such minute structures EBL and FIB are not always suitable due to their high facility cost, low throughput and stringency of processes. In order to fabricate nano-dot array more simply and efficiently, the authors propose its fabrication metod utilizing ultra precision machining. 1 μm-pitch line & space groove pattern and lattice groove pattern are made on a soda glass and quartz glass substrates by ultra precision machining with diamond tool. After gold coating on the substrates and annealing them, gold nano-dots aggregate and their alignments are controlled by the groove pattern.