抄録
Nanomechanical resonators are widely studied for the applications to various sensors and oscillato It is difficult to capacitively detect its vibration of nanomechanical resonators because of its small capacitance and large motional resistance. One of the methods for lowering the motional resistance is to use mechanically coupled resonators. In this method, the capacitive detection of the vibration will be available by increasing the total capacitance. In this research, the coupled multiple nanomechanical resonators are designed, fabricated and evaluated. The nanomechanical resonators have a shape of clamped-clamped beam structure and those can be vibrated at a flexural mode. Its length is 21.3 μm, width is 500 nm, thickness is 5 μm, and the capacitive gap is 300 nm. The resonant frequency of fundamental flexural mode is designed to be approximately 9.4MHz. The number of coupled naomechanical resonators are 100. The fabricated resonators are evaluated by network analyzer. As the result, some resonant peaks are observed, which shows that most of nanomechanical resonators will be synchronized.
