狭差二平板間における微小液滴の挙動 ii

抄録

Leidenfrost effect is a physical phenomenon occurs in liquid droplets which are close to a solid surface heated up to a significantly high temperature compared to the boiling point of the liquid. In the Leidenfrost effect, the vapor layer between the droplet and surface keeps the droplet levitate without touching the surface. Previously, we developed a new technique named Mist CVD, in order to fabricate uniform functional thin films under atmospheric pressure. In Mist CVD, the micro-meter-size mist droplets in the Leidenfrost state play a vital role in the thin film fabrication with atomic-layer-level arrangement and high uniformity on large-scale substrates under atmospheric pressure. However, the properties and behavior of these micro-size droplets are not well understood. It is even not clear which mechanism is responsible for the growth of thin films in Mist CVD. This work studied the relationship between substrate temperature and the evaporation time of pure water millimeter-size droplets in Leidenfrost state. In addition, images of micrometer-size Leidenfrost droplets could be captured using a microscope connected with a digital camera and a nanosecond flash light souse.