塩素発生用電極触媒のコンビナトリアル評価基板の作製

抄録

In this study, we proposed and demonstrated combinatorial evaluation substrates, which were fabricated by micro electro mechanical systems (MEMS) process, for brine electrolysis. Proposed evaluation substrate has 9 catalyst electrode samples on the glass substrate. Ir-Ru/Ti and Ir-Ru-Ti/Ti alloy catalyst electrode samples were prepared by a combinatorial co-sputtering system. We evaluated the maximum current density of polarization curves and the durability during brine electrolysis. Their polarization curves were measured by a linear sweep voltammetry in NaCl solution of 30 g/L. Measurement system consisted of beaker cell, potentiostat/galvanostat, function generator, and data logger. In this measurement, working electrodes were fabricated catalyst electrodes, reference electrode was Ag|AgCl electrode, counter electrode was Zr plate. Durability was evaluated by the observation of catalyst surface and X-ray diffractometry before and after brine electrolysis. In the case of binary Ir-Ru/Ti evaluation substrate (composition of Ru ranged from 35.1 to 58.8 at.%.), the maximum current density increased with increasing Ru-content. From these results, we confirmed the usability of proposed combinatorial evaluation substrate for brine electrolysis. Finally, we evaluated electrochemical characteristics of 9 Ir-Ru-Ti/Ti samples. Their electrochemical characteristics depend on alloy composition.