Analyses of Dynamic Behavior for Galvano Scanner Based on Coupled Analysis Simulation

Abstract

This paper presents a modeling approach for the galvano scanner to analyze the dynamic behavior during positioning. The galvano scanner requires high precision positioning and the flatness of the mirror to reflect the laser beam with precision. However, mechanical vibrations of the mirror, which are excited by the moment during positioning, lead to residual vibrations after positioning. These vibrations degrade the flatness of the mirror and the laser manufacturing accuracy. In this paper, the mechanism including the elastic bodies is modeled using a multibody dynamics software, while the control system is constructed on a control design software. Dynamic behavior of the mirror during actual motion can be visualized by integrating these software.