Frequency Modulated/Whole Angle MEMS Gyroscope using CW/CCW Mode Separator

Abstract

This paper reports a novel frequency modulated (FM)/whole angle(WA) gyroscope using independently controlled CW/CCW mode oscillations on a single resonator. A CW/CCW mode separator was developed and each mode was independently excited on a single resonator. Applied angular rate was detected by the FM-mode operation with excellent linearity. The scale factor had almost no temperature dependency. In addition, the rotation angle was directly detected by the WA-mode operation with excellent linearity.