高感度触覚センサへの適用を想定したマイクロ蛇腹ばねの作製と特性評価

抄録

Micro-bellows spring which can be deformed by minute force was fabricated using three-dimensional laser stereo lithography system. The size of spring was as follows; natural length: 450 μm, bellows diameter: 250 μm, thickness: 8 μm. Aluminum thin film (thickness: 0.5 μm) was deposited on the surface of spring by DC sputtering. The resistance change of the aluminum thin film caused by compressing the spring was measured and properties of it for tactile sensor were evaluated. The spring was compressed by pressing it to the copper plate using a precision stage equipped with micrometer. As a result, the resistance was changed in response to the deformation of spring.