フェムト秒レーザ還元を用いたフレキシブル基板上へのCuメッシュ電極の直接描画

抄録

Cu-based mesh electrodes were directly written using femtosecond laser reductive sintering of CuO nanoparticles. CuO nanoparticle solution containing CuO nanoparticle, polyvynilpyrrolidone, and ethylene glycol was spray-coated on flexible poly(dimethylsiloxane) substrates. Femtosecond laser pulses were focused onto the CuO nanoparticle solution using an objective lens with a numerical aperture of 0.45 in air. When the scan pitch for mesh patterning was more than 25 μm, Cu-rich mesh patterns were formed. The Cu-mesh temperature sensors were fabricated at the scan pitch of 50 μm. The temperature coefficient of the sensor was +0.004, which is consistent with the Cu bulk one. This fabrication process is useful for additive manufacturing on flexible and nonplanar surfaces.