交流電気浸透マイクロポンプの高出力化に関する研究

抄録

An AC electroosmosis (ACEO) micropump has been required for μ-TAS, lab-on-a-chip, and so on due to its miniaturizable simple structure to generate a water flow without mechanical moving parts. To design ACEO devices, an ACEO mathematical model is needed, however, the previous model has large discrepancy between the simulated and measured velocities when physical parameters are used. To overcome the problem, in this study, a new mathematical model was proposed considering the forming time and the nonlinear capacitance of the electric double layer and FEM simulations were performed for a simple ACEO convection generator. The device was fabricated using MEMS fabrication process. Through comparison between the simulated slip velocities and the measured ones, the effectiveness of the proposed mathematical model was confirmed. Finally, the mathematical model was applied to the design of the SS-ACEO-MP (Square pole - slit electrodes ACEO micropump) and the higher flow velocities than those of the previous device were estimated.