厚膜レジストの円筒リソグラフィとNiめっきによる能動カテーテル機構部の一括形成

抄録

This paper presents a novel batch fabrication process of cylindrical skeleton structure with a helical flat-wire-coil spring and insulating parts for tubular shape memory alloy (SMA) active catheter. The fabrication processes based on UV laser lithography and Ni electro-plating on the cylindrical surface was examined on a dummy Cu core rod instead of a tubular SMA actuator. Both 20-μm-thick negative resist (SU-8) micro-structure and positive resist (OFPR-800LB) mold for electroplating were successfully lithographed by UV laser direct drawing with low temperature resist baking process (45℃, 12h). A Ni bias spring with helical flat-wire-coil shape was successfully electroplated in the thick resist mold pattern on a rotationally sputtered Cu seed layer. Mechanical attaching and electric connection parts were also batch fabricated through the fabrication processes.