Arイオンミリングによるダイヤモンド切削工具刃先形状の加工

抄録

Characteristics of a sharpening process of the damaged SCD (Single Crystal Diamond) cutting tool by the argon ion milling apparatus are discussed. 3D etching simulations are performed to estimate the shape change by the milling process. Simulation results are indicated that the newly planer surface as the rake face is processed on the rounded edge by change in the irradiation direction of the ion beam. This tendency was also indicated in the etching experiments they were performed by the same condition on the simulations.