Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : September 05, 2021 - September 08, 2021
A sacrificial water-soluble BaO layer was employed to fabricate free-standing single-crystalline BaTiO3 membranes and prepare the inorganic-organic hybrid heterointerface for vibrational energy harvesting applications. An epitaxial BaTiO3/SrTiO3/BaO heterostructure was deposited on a SrTiO3(001) substrate by pulsed laser deposition. The sacrificial BaO layer was dissolved by immersing the heterostructure into water. An epitaxial inorganic BaTiO3 membrane was released from the SrTiO3 (001) substrate and transferred onto a glass or polyethylene terephthalate (PET) substrate coated with an organic polydimethylsiloxane (PDMS) adhesion layer. A 200 nm-thick BaTiO3 membrane was sandwiched between two flexible PDMS/ITO/PET electrode layers, forming a vibrational energy harvester test device that could operate at an average electrical power output of over 2 μW.
