Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : September 05, 2021 - September 08, 2021
Tactile perception is important for capturing and computerizing the grasping state of objects. Based on MEMS technology, our laboratory has developed a tactile sensor using microcantilevers embedded in the elastomer. How to improve the sensitivity of this sensor has always been a problem in the case of grasping lightweight or soft objects. In this work, we investigated the influence of the substrate temperature during sputtering the strain-gauge film on the sensitivity of the sensor. NiCr thin films as strain gauge sputtered at room temperature, 150°C, 175°C, and 200°C, and the tactile sensors using them were fabricated. It is found that the sensitivity of the tactile sensor is significantly improved by using NiCr deposited at higher substrate temperature because their crystalline structure is different from that deposited at room temperature.
