CW/CCWモード分離を用いた周波数変調磁気センサ

抄録

This paper reports a frequency modulated (FM) Lorentz force MEMS magnetometer using superposed clockwise (CW) and counter clockwise (CCW) modes on a quad mass resonator. Sensing currents synchronous to both modes modulate the modal stiffnesses, eventually resonant frequencies. The current directions correspond to both modes have same amplitudes but opposite direction, thus the frequency difference between CW and CCW modes could be generated. In this paper, the principle of operation was confirmed by the numerical simulation. The estimated sensitivity was 7.87 Hz/mT.