MEMSヒータを用いた気体熱伝導式センサの水素検知特性

抄録

Advanced hydrogen safety technology is essential for the realization of a hydrogen energy society. In this context, the role of hydrogen sensors are very important. Therefore, we have been developing a novel thermal conductivity gas sensor using a MEMS (Micro Electro Mechanical Systems) micro heater. This sensor is a low power, extremely robust device especially suited to detect hydrogen as hydrogen possesses the highest thermal conductivity of all known gases. The use of a MEMS heater to reduce the element size has resulted in a faster thermal response, resulting in a faster response to hydrogen compared to conventional sensors.