MEMS振動子のための零熱膨張率ガラスの反応性イオンエッチング

抄録

In this paper, the reactive ion etching (RIE) of a glass with zero coefficient of thermal expansion (CTE) is reported, which can be used for a high Q-factor resonator used in timing resonators and gyroscopes. ZERO CTE glass can be used for a high Q-factor resonator, which is a key element for gyroscopes. SF6 and Xe were selected as etching gases. A thick Ni film was used as an etching mask. Experimental results show that ZERO CTE glass can be patterned by RIE at an etching rate similar to that of quartz glass. Due to the impurities which were used to control the CTE, the etched surface become rough and the sidewall tilted at about 20 degree. The minimum etching width as small as 30 μm could be achieved.