年次大会
Online ISSN : 2424-2667
ISSN-L : 2424-2667
2023
セッションID: J224p-11
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Strength Control of Silicon MEMS using electron beam induced Silicon Nanodots
Abbhiraj SinghShingo KammachiTakahiro Namazu
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In this presentation, a new method for active control of the strength of SiO2 film using Si nanodots (Si-NDs) is proposed. An electron beam (EB) irradiation creates Si-NDs in an SiO2 film. The number, size, and distribution of the Si-NDs in the film can be controlled by EB irradiation energy. Since Si has higher fracture toughness than SiO2, a crack, initiated in SiO2, propagates into the film while preventing Si-NDs during fracture. Consequently, the fracture of SiO2 film can be controlled by Si-NDs, leading to active control of strength for SiO2-coated Si microelectromechanical systems (MEMS).

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© 2023 The Japan Society of Mechanical Engineers
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