Improvement of Sensitivity of MEMS Tactile Sensors by Improving Cantilever Planar Geometry

Abstract

In this study, the cantilever planar shape was improved to increase the sensitivity of a cantilever-type MEMS tactile sensor to normal force and shear loading. Analysis showed that a trapezoidal shape, which extends from the fixed end to the free end, can improve the sensitivity to normal force. However, it was found that if the shape of the Cr layer patterning for stress is the same as before, it becomes curved when the free end direction is widened, resulting in a decrease in sensitivity. We fabricated a new cantilever with Cr longitudinal stripes and radial patterning. As a result, we were able to improve the sensitivity to vertical load by a factor of about 5 and to shear load by a factor of about 7.