同軸二重管構造を用いた大気圧マイクロプラズマジェットの生成制御とその特性

抄録

Atmospheric pressure micro plasma jets, which form thermally nonequilibrium discharge plasma in the form of jets, are expected to be applied to medical and environmental technologies. When the structure of the discharge tube jet nozzle is a double coaxial pipe, an independent plasma jet is formed in the inner and the outer layer, and these are synthesized at the nozzle outlet, enabling control from electrical, thermal, and fluid engineering aspects. In this study, we succeeded in using Ar gas as the working gas, generating an atmospheric pressure micro plasma jet by using the double coaxial pipe structure. Then, gas flow velocity in two layers, applied voltage, and distance between electrodes were changed, the controllability in the generation of this plasma jet and its characteristics were investigated. As a result, it has been clarified that this generation method of micro plasma jet is effective by properly controlling condition for various applications.