The Proceedings of Mechanical Engineering Congress, Japan
Online ISSN : 2424-2667
ISSN-L : 2424-2667
2024
Session ID : J114p-10
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Friction force distribution measurement on micro-nano patterns
*Atsushi KAIYasuhisa ANDO
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Abstract

We performed friction force distribution measurements to elucidate the lubrication characteristics on micro and nano groove patterns under lubrication. First, we fabricated a lens probe cantilever with a deflection sensitivity of 0.11 mV/nm. The plate specimen was prepared on a Si plate through anisotropic etching, multilayer film deposition, and polishing, resulting in the formation of microgroove patterns and a nanostripe structure on its surface. The cantilever enabled us to observe the meniscus and to calculate the adhesion force as 0.38 mN. From the friction force distribution image, the location of the microgroove patterns was identified under a constant sliding speed condition. It was found that the friction force was lower at the microgrooves than on the ridges. The transition from the mixed lubrication region to the fluid lubrication region was observed at a sliding speed of 100 μm/s. Comparing the average friction force between the nanostripe structure and the microgroove patterns, the friction force of the nanostripe structure was lower at almost all sliding speeds.

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© 2024 The Japan Society of Mechanical Engineers
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