マイクロナノ機械の信頼性：作って測って壊し, そして創る

抄録

In this presentation, our research topics related to reliability of nano and microscale machines are introduced. To evaluate the mechanical properties in micro and nano scale, specimens with excellent quality are needed to be prepared. With a help of microfabrication technologies, we succeeded in fabricating such specimens and measured their excellent mechanical properties of silicon and related materials. However, these works are often destructive, nano and microstructures with very high quality should be destroyed. From these experiences, we have proposed to use fractures to create a new device, which has excellent surface quality to be able to explore physics in nanoscale gaps.