抄録
Fast probing is an effective way to improve measuring efficiency of coordinate measuring machines (CMM). In the fast probing, the CMM's structure is deformed and the air bearing gaps are changed by inertial and driving forces so that the probe position is deviated. A virtual-CMM can be used for simulating the measurement errors of the CMM. In this paper, (1) a finite element method (FEM) approach is proposed for establishing the fast probing error model, (2) the deformation of the CMM moving with a constant acceleration is simulated and the error maps of probing points are derived, (3) several gauge blocks are virtually measured in the simulation and measurement accuracies are calculated.
