抄録
Miniaturization of machining tools and its integration to a compact machining system brings down-scaling of the entire manufacturing system, which can be observed especially in the fields of electronics production and micro-machine production, today. These miniature manufacturing systems called Micro Manufacturing Systems (MMS), demand high-precision. Therefore alignment accuracy of working tools becomes a substantial factor. However, it is difficult to apply a direct-adjusting-mechanism for accurate alignment due to its micro size. In this project we aim at developing an indirect-adjusting-mechanism for aligning the rotational axis of an abaxial micro spindle, utilizing laser-induced thermal stress. We analize the process of laser-induced bending, define the charateristics to the applied circumstances, and evaluate the feasibility of this method.
