抄録
In this study, we develop a kinematically dissimilar master-slave system : as for a slave robot we utilize a magnetically levitated micro robot, and as for a master robot an X-Y-Z Cartesian manipulator. It is desirable that micro components would be manipulated by a micro robot which is not contact with its surrounding, for example using magnetic forces. Since the micro robot is levitated by magnetic forces in stable condition, it does not get any forces from outside. Therefore, we cannot apply conventional force-feed back master-slave systems for this system. Thus, we propose a method using an impedance model. Using the model, we assume the dynamics of the slave robot, and we calculate an external force that would work on the micro robot when contacting an object. We confirm the effectiveness of the positioning control algorithm through practical experiments as the first step of development of the master-slave system.