抄録
We have investigated the advantageous condition to the actuator as a principle using thermal bubble by electric micro heater. A micro heater has been investigated occurrence situation of a thermal bubble by various heating energy and time. As a result, it has been observed that it becomes better if the input voltage to the heater is high and heater size is small as a trend. We have been also carried out driving possibility of actuator array that adapts to a micro pump using the examined condition. The micro actuator has been driven at responsiveness of 0.8Hz and it's displacement was 35μm.
