For miniaturization of planar inductors with ferrite layers, we have to solve the problem of reduction in inductance. This report shows the effect of turn numbers and upper ferrite thickness. 3.8×3.8mm inductor achieved inductance of 1.3μH and quality factor of 40 at 5MHz. These values are equivalent to those of 6.0×6.0mm inductor shown in previous report^<1)>. On the other hand, because of the small volume of ferrite, the maximum DC bias current of 3.8×3.8mm inductor is smaller than that 6.0×6.0mm inductor.