The proceedings of the JSME annual meeting
Online ISSN : 2433-1325
2002.5
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Development of Micro : Roughness Measuring Probe
Akinori SAITOSatoshi KOGAKazuhiko HIDAKA
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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 283-284

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Abstract
This paper presents a new micro-roughness measuring probe which uses a longitudinal tapping mode by an ultrasonic vibration sensor. The sensor controlled by a measuring force control system including a fine and a coarse servo driving mechanism realize non-destructive, accurate and rapid measurement. The measuring force is 0.3μN-750μN, and the two servo driving mechanisms realize a quick response and wide measuring range. Step height standard calibrated by VLSI Standard is measured by this probe with nm resolution.
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© 2002 The Japan Society of Mechanical Engineers
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