Abstract
This paper presents a new micro-roughness measuring probe which uses a longitudinal tapping mode by an ultrasonic vibration sensor. The sensor controlled by a measuring force control system including a fine and a coarse servo driving mechanism realize non-destructive, accurate and rapid measurement. The measuring force is 0.3μN-750μN, and the two servo driving mechanisms realize a quick response and wide measuring range. Step height standard calibrated by VLSI Standard is measured by this probe with nm resolution.
