Passive Microvibration Control of Precision Machines with Smart Structure Using Piezoelectric Devices

Abstract

A smart structure using piezoelectric devices electrically shunted by inductor-resistor circuits was tested for passive microvibration control of an electron microscope model which was a typical example of precision equipment. It is known that the piezoelectric device with the shunted circuit can work like a dynamic vibration absorber. Eight piezoelectric devices of d_<31> type having a 60×60×5 mm external size were attached to the model. Two types of shunted circuits for single-mode vibration control and double-mode vibration control were tested. Though the tests, it was confirmed that the smart structure could effectively attenuate microvibration of precision equipment by using the single-mode control or the double-mode control. Furthermore FEM analysis was carried out for the control performance of the smart structure with satisfactory results.