Active Microvibration Control Using Piezoelectric Actuators for Base-Isolated Semiconductor Factories : Control of Microvibration Generated in Building-Part 1

Abstract

A smart structure was tested for active microvibraion control of a 2-story steel frame base isolated building model of a 5×3×4^Hm outer size and a 6900kg total weight which was excited by micrivibration generated in building. In the structure, piezoelectric actuators attached to the columns and the beams were used for the microvibration control by bending moment control of them. The controller was designed using model matching control theory.