The proceedings of the JSME annual meeting
Online ISSN : 2433-1325
2002.6
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Ab Initio Molecular Dynamics Simulation on Structure of Si/Al Contact
Yoshitaka UMENOTakayuki KITAMURA
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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 221-222

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Abstract
It is of great importance to elucidate atomic structure and bonding system at a contact of different materials in terms of understanding various characteristic properties emerged by the contact. In this study, ab initio molecular dynamics simulation on precipitation of Al atoms onto Si surface is conducted to investigate the atomic and electronic structure of the contact of Si/Ai. At first, Al atoms are settled above a ditch between dimer rows of the Si surface and are arranged in a line. After the ditch is filled with the Al atoms, Al atoms are adhered near the line and they construct bonds with each other and with Si atoms in the dimers as well. Consequently, a dense Al layer is formed on the Si surface.
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© 2002 The Japan Society of Mechanical Engineers
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