A trial for a micro-structure machining of brittle materials by means of UV laser

Abstract

This paper describes a trial for the micro-structure machining of brittle materials by means of UV laser, whose wave length is 355nm. Grooving by the UV laser was executed for alumina ceramics and LiNbO_3 to search cutting conditions for crack free cutting. As a result, the region of such cutting conditions was presented on a map with energy/pulse and pulse/length in the horizontal and the vertical axis, respectively. Using the cutting condition in the region, a slit for waterjet mask machining was made on alumina ceramics plate successfully. The width of the slit was 50μm. Furthermore, a linear protuberance for optical devices was made on LiNbO_3. However the shape of the structure was not enough smooth for an optical device.