3214 MEMS 技術を応用したアクティブヘッドスライダの開発

抄録

This paper describes design and fabrication of MEMS-based active head sliders using a PZT thin films for flying height control in hard-disk drives. A structure of a slider with a pizeoelectric cantilever and an air bearing surface (ABS) geometry which generates very low aerodynamic lift force below the head have been designed. The slider was fabricated monolithically by silicon micromachining process. The slider was then mounted on the suspension and flying height above a spinning disk was measured. Change in the flying height of the head has been successfully confirmed by applying voltage to the PZT actuator.