Abstract
Micro-stereolithography (MSL) is one of micro maching methods and it can create real 3D shape micro structures. It is important to know mechanical properties of micro structures made by MSL. In this study, a new measurement equipment was developed and Young's modules of micro cantilevers made by MSL were measured. As the results, Young's module of micro cantilevers which irradiation laser power were 10.30 μW is higher than that which irradiation laser power were 8.86 μW. Moreover, Young's module of another cantilever made by irradiation of ultraviolet light is higher than that made by MSL. The difference of these cantilever's Young's module is likely caused by polymerization degree and inside fabric of cantilever.
