抄録
We focus on the development of the new biocpmpatibility piezoelectric material as a microactuator for Bio MEM. The combinations of biocompatible atoms to constitute perovskite-type crystal structure were selected by those atoms that satisfy geometric stable condition. In the case of perovskite-type crystal structure, we have chosen MgSiO_3 as a candidate for piezoelectric materials. The stable cubic structure of MgSiO_3 was obtained by first principles DFT Helicon wave plasma sputtering method can produce sputtered particles, which have larger potential energy, because of low working pressure. However, in order to create new biocompatibility piezoelectric material by the method, there are many sputtering factors. Therefore, the experimental design method was used for invention condition search. It was shown that composition gap for deposited thin film was influenced by substrate temperature and target ratio.
