抄録
This paper describes a powerful microactuatdr driven by gas-liquid phase-change. The microactuator is made of a welded stainless steel bellows and its outer diameter of 7.8mm. The operating liquid is chlorine less perfluorocarbon (C_5F_<11>NO). Operating fluid and a heater are enclosed in the bellows. The microactuator generates force of 23.1 N by the supplying energy of 1.2W, when its displacement is 0mm. We measured a generated force by an actuator for investigation of a force balance mathematical model. We modeled microactuator and confirmed that we can predict the generated force of the gas-liquid phase-change microactuator.
