抄録
Piezoresistive materials are those whose electrical resistivity changes in response to changes in their mechanical strain. Piezoresistive transducers, which usually consist of a piezoresistive device and a flexible structure, are widely used in the form of various sensors such as pressure sensors and accelerometers. This paper proposes a new topology optimization method for the design of the piezoresistive transducers. First, the design specifications are clarified and the objective functions satisfying the required specifications are formulated. A multi-objective function is also formulated for use in finding an optimal structure that incorporates all the design specifications. Finally, several examples are presented in order to confirm the usefulness of the proposed method for the design of piezoresistive transducers.