2401 圧電素子を用いた振動型接触プローブの特性解析(J22-1 圧電素子とマイクロアクチュエータ,J22 マイクロメカトロニクス,2005年度年次大会)

抄録

In this paper, a novel vibration touch probe consisting of a piezoelectric device is proposed. This bilateral probe outputs the feedback voltage in accordance with its position. This probe has a simple structure and high robustness. The purpose of this research is to make clear the characteristics of the sensor in order to build the 3D shape-measuring control system using this probe. Therefore, the property of the probe is investigated, such as frequency characteristic, behavior about vibration, relationship between displacement and feedback voltage, and robustness against high acceleration. The results of those researches show the possibility of the developments of 3D shape-measuring system.