2717 金属ガラスの急速加熱制御マイクロ成形加工装置の開発(S33-2 材料の超精密加工とマイクロ/ナノ加工の動向(2),S33 材料の超精密加工とマイクロ/ナノ加工の動向)

抄録

Superplastic forming of metallic glasses is useful for fabricating micro- and nano-devices. This material exhibits Newtonian viscous flow between the glass transition temperature T_g and the crystallization temperature T_x. During the heating, T_g and T_x increase and the normal viscosity l decreases with increasing heating rate. As an application of this phenomenon, characteristic microforming should be performed during rapid heating, at very high strain rates and under low stresses. In this paper, we developed a new microforming system based on the characteristic behavior of Zr-based metallic glass under rapid heating. Using this apparatus, microforging was carried out within a few seconds. The system would be most effective in the mass production of micro parts for MEMS.