The aim of this study is to improve the quality of micro-structured parts manufactured by Micro Sacrificial Plastic Mold Inserted Metal Powder Injection Molding (μ-SPiMIM) process using LIGA. The defects in plastic injection molding such as weld-line and short filling, which developed around micro pillar structures of plastic molds, were evaluated with a laser microscope observation. The effects of molding conditions on the quality in micro injection molding of micro plastic parts were discussed. The effects of molding conditions in metal powder injection molding were also investigated.