3016 Al-B-C膜の機械的特性および高温酸化特性に及ぼす組成の影響(S38 皮膜の磨耗および残留応力特性(2),S38 コーティング材料の皮膜特性とその評価)

抄録

Al-B-C thin films have been prepared on Si substrates by DC magnetron sputtering at 350℃. The compositions of the films were varied with using an Al-C composite target, AlB_2 target and B_4C target with Ar gas and/or CH_4 gas introducing. In this experiment, high temperature oxidation was investigated with heating the films at 500℃and 800℃ in air. Friction and wear properties were also investigated. Al-B-C thin films containing 24at% Al deposited using AlB_2 target and B_4C target with Ar gas showed high performance after heating. The films containing 34at% C and having bonding of B and C deposited using AlB_2 target and B_4C target with Ar gas and CH_4 gas were oxidized easily at 800℃ because of losing C. It suggests that the increase in content of Al is effective against oxidation of the films and obtaining crystals of B_4C in the films will improve oxidation resistance of Al-B-C thin films. However, the films containing 34at% C showed lower friction coefficient and higher wear resistance than the films containing 24at% Al.