3949 らせんナノ構造を有する薄膜の変形特性(S21-2 静的強度評価,S21 ナノ・マイクロ構造体の強度物性と信頼性)

抄録

An experimental method is developed to evaluate the deformation property of thin films with helical nanostructures (nanosprings). In this method, several nanosprings are combined by a cap layer and not only vertical but also lateral load is applied to the layer. In particular, this is the first report of the lateral stiffness measurement of nanosprings. The thin film with helical nanosprings shows anisotropic deformation and the stiffness is two to three orders lower than that of dense films.