抄録
We present a concept of a valveless micropump for gases using microdiffusers to rectify the gas flow. Driving part is a microheater made of thin film platinum operating in periodic heating and cooling cycles. The pump is designed to fit into a future sensor network for environmental monitoring. The design allows an airflow rate of ca.l μl/s. Calculated maximum heater temperature is ca. 500℃. The maximum heating/pumping frequency is in the range of 5kHz. At this speed, the pump displaces about 3% of its volume in one pumping cycle.
