抄録
We made a prototype Joule-Thomson micro-cooler that was fabricated on Si wafer by photofabrication. The micro-cooler in the present study uses ethylene as a refrigerant. Inlet and outlet gas pressures are set to 2.5MPa and 0.1MPa, respectively. There are slits on counter-flow heat exchanger to prevent heat flow to the cold region along Si wafer. Evaporator temperature reached 270K with pressure of 2.5MPa and mass flow of 9.98mg, and we confirmed the operation of micro-cooler.
