It is believed that cells can sense force and deformation, and it is one of the most important research objects in the field of cell biomechanics to clarify the cellular mechano-sensing mechanism. Many experimental studies have been conducted to evaluate the cellular response to applied mechanical stimulus. In most of these studies the size of mechanical stimuli loading device were relatively large compared to the single cell size. In addition, the evaluation of mechanical condition was conducted in macro level. Although the innovation of observation apparatus brought us extremely high spatial and temporal resolution, the size of mechanical stimulus loading device limited to design fine experimental system to observe the cellular response with submicron or nano-level and millisecond order. In this study, we proposed a novel fabrication process to make a silicone elastomer microstructure. This silicone elastomer microstructure was designed to aim at a mechanical stimuli loading device for a single cell level. A test piece was designed and fabricated to confirm the productivity of proposed process.