3746 Development of a magnetically levitated micromotor
Details
For microelectromechanical system, mechanical friction severely limits its performance and lifetime. Therefore contact-free levitation mechanism is an essential step in increasing its performance of micro mechanical devices. We have developed and evaluated a contact-free micromotor. The micromotor system is composed of a stator that has eight electromagnets and a disc-shaped rotor that has 6 poles. And, we design a contact-free micromotor with Field Programmable Gate Array (FPGA), which aims at its miniaturization and its higher performances.
