2113 薄膜磁気センサを用いた磁場分布のナノ分解能再構成法(J02-3 逆問題解析手法の開発と最新応用(3),J02 逆問題解析手法の開発と最新応用)

抄録

This paper introduces a magnetic field measurement technique with nano-resolution using a thin-film magnetic sensor. The method consists of a process, where the thin-film magnetic sensor is scanned over the sample, followed by a processing using a deconvolution scheme. In the scanning process, the thin-film magnetic sensor is scanned over the sample perpendicularly to the sensor. The sample is rotated horizontally under the sensor so that data measurements are obtained at different angles and positions. The deconvolution can be performed using existing methods, which are familiar in computed tomography technology. Numerical simulations were performed to demonstrate the technique's capability of achieving nano-resolution measurements. Currently, thin-film magnetic sensors are used as reading heads in hard drive disks, such as giant magnetoresistive heads, and the film thickness is less than 10nm. Previously, the resolution of the measurement was limited by the width of the sensor (ie. 100nm), however, the new technique has the same resolution as the film thickness (ie. 10nm).