Abstract
We propose the new advanced micromotor integrated with Electro-conjugated Fluid (ECF) jet and MEMS fabrication technology. To realize three-dimensional complex structures of ECF micromotor, we present the fabrication method of multilayer combined with two different kinds of thick photoresists: one is for microstructure, while the other is used sacrificially. Electrodes for ECF jet and the first layer were successfully fabricated. As a result of ECF jet observed in the stator whose inner diameter was 500μm, we showed that improvement of surface flatness for the following layer could realize MEMS-based ECF micromotor.
