抄録
Si-DLC and Cr-DLC thin film were successfully produced as a friction reduction coating on to Al_2O_3 using plasma ion immersion deposition and dual magnetron sputter deposition with different deposition parameters. Metal Cr and Si layer were applied as bonding layers prior to or during the deposition on the samples. To investigate their tribological properties, reciprocating wear tests were carried out on the DLC coated specimens. The properties of the coated DLC film were examined by AFM, SEM, EDX and nano-indenter. As a result, Cr-DLC shows the low friction coefficient, good wear resistance and high adhesive strength. Si-DLC applied non-RF plasma also has the lowest friction coefficient, good wear resistance and the highest hardness.
