3039 Static and Dynamic Characteristics of Surface-compensated Aerostatic Porous Thrust Bearings with 2^<nd> Restrictor Inserting into an Air Feed Port
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Recently, linear guide way systems supported by the surface-compensated aerostatic bearings are widely used for ultra-precision machines, such as semiconductor photolithography machines and ultra-precision measurement machines. In the previous paper, authors proposed the new type of surface-compensated aerostatic thrust bearings using porous material and improvement method of static stiffness of this type of bearings. It was found that proposed method is effective in increasing the static stiffness. In this paper, dynamic characteristics of surface-compensated aerostatic porous thrust bearings with 2nd restrictor inserting into an air feed port is investigated.
