Abstract
As a 3-DOF microactuator for micromachines such as in-pipe working micromachines for small diameter pipes in power plants, a pump and valve-integrated ER microactuator was proposed and the basic investigations were performed. The proposed actuator features high power density and simple and compact 3-DOF mechanism. First, the pump and valve-integrated ER microactuator was proposed. Second, as the micro fluid power source, a micropump using fluid inertia effect in a pipe with a micro sheet valve was proposed and developed. Finally, a 1-DOF valve-integrated ER actuator was fabricated and the characteristics were experimentally investigated.
